SEMICON Russia 2011 (G)
SVCS PROCESS INNOVATION S.R.O.
Brno, CZ-637 00
SVCS Process Innovation s.r.o., company established in 2000 and based in the Czech Republic, designs and manufactures batch horizontal
furnaces for the semiconductor and photovoltaic industry. The furnaces, both for atmospheric and LPCVD processes, are outstanding in the quality of selected components. The key features include high process uniformity, large production
capacity, reduced maintenance and a state-of-the-art control system with a customized and an easy-to-use user interface.
Other products include various gas source systems like gas cabinets, valve manifold boxes and custom equipment gas manifolds. Besides traditional POCl3 process improvement SVCS offer also LPCVD nitride and various forms of oxide, both for production plants and research institutes. SVCS has experience with reasonably priced small size research equipment fitted to specific customers needs.